A High-Resolution Active Microwave Sensor for Contactless Pressure Measurement

Document Type : Original Article

Authors

1 Master's student, Faculty of Electrical Engineering, Hakim Sabzevari University, Sabzevar, Iran

2 Assistant Professor, Faculty of Electrical and Computer Engineering, Hakim Sabzevari University, Sabzevar, Iran

Abstract

In this paper, an active contacless microwave pressure sensor with high-quality factor for harsh environment applications are presented. The proposed sensor operates at 1.2GHz and consists of two parts of a reader antenna and a passive Split Ring Resonator (SRR). A movable pad is located above the resonator by considering an air gap between them and this gap is decreased when external pressure is applied. By decreasing the gap, the resonant frequency of SRR is decreased. The resonant frequency of SRR is measured by using the insertion loss scattering parameter through the reader part, wirelessly. To improve the resolution, the sensor’s quality factor is enhanced by using an active circuit with a positive feedback design in the reader part. Therefore, the quality factor of the passive sensor is increased from 73.91 to 3268 by using the active sensor. The sensitivity of the sensor is 70MHz/mm in both passive and active sensors. The proposed sensor is simulated and studied using CST and ADS software.

Keywords


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[1]    M.A Imran, S. Hussain, and Q.H. Abbasi, “Wireless Automation as an Enabler for the Next Industrial Revolution,” John Wiley & Sons, 2020. 
[2]    M.P. Boyce, “Gas turbine engineering handbook,” Elsevier, 2011. 
[3]    G. W. Hunter et al., "Development of chemical sensor arrays for harsh environments and aerospace applications," Sensors conference, IEEE, Orlando, USA, 2002.
[4]    H. Kou et al., “A microwave SIW sensor loaded with CSRR for wireless pressure detection in high-temperature environments,” Journal of Physics D: Applied Physics, vol. 53, 2019.
[5]    J.E.  Rogers et al., “A passive wireless microelectromechanical pressure sensor for harsh environments,” Journal of Microelectromechanical Systems, vol. 27, pp. 73-85, 2017.
[6]    G.H.  Kroetz et al., “Silicon compatible materials for harsh environment sensors,” Sensors and Actuators A: Physical, vol. 74, pp. 182-189, 1999.
[7]    J.  Xu et al., “A novel temperature-insensitive optical fiber pressure sensor for harsh environments,” IEEE Photonics Technology Letters, vol. 17, pp. 870-872, 2005.
[8]    Y. Zhu et al., “High-temperature fiber-tip pressure sensor,” . Journal of lightwave technology, vol. 24, pp. 861-869, 2006.
[9]    C.M. Jewart et al., “Ultrafast femtosecond-laser-induced fiber Bragg gratings in air-hole microstructured fibers for high-temperature pressure sensing,” Optics letters, vol. 35, pp. 1443-1445, 2010.
[10]         H. Cheng et al., “Evanescent-mode-resonator-based and antenna-integrated wireless passive pressure sensors for harsh-environment applications,” Sensors and Actuators A: Physical, vol. 220, pp. 22-33, 2014.
[11]         S. Su et al., “Slot antenna integrated re-entrant resonator based wireless pressure sensor for high-temperature applications ,” Sensors, vol. 17, pp.1963, 2017.
[12]         L. Lin et al., “Fabrications and performance of wireless LC pressure sensors through LTCC technology,” Sensors, vol. 18, pp. 340, 2018.
[13]         Q. Tan et al., “A wireless passive pressure microsensor fabricated in HTCC MEMS technology for harsh environments,” Sensors, vol. 13, pp. 9896-9908, 2013.
[14]         T. Luo et al., “A passive pressure sensor fabricated by post-fire metallization on zirconia ceramic for high-temperature applications,” Micromachines, vol. 5, pp. 814-824, 2014.
[15]         C. Zheng et al., “Design and manufacturing of a passive pressure sensor based on LC resonance,” Micromachines, vol. 7, pp. 87, 2015.
[16]         W. Li et al., “Wireless passive pressure sensor based on sapphire direct bonding for harsh environments,” Sensors and Actuators A: Physical,, vol. 280, pp. 406-412, 2018.
[17]         J. Xiong et al., “An insertable passive LC pressure sensor based on an alumina ceramic for in situ pressure sensing in high-temperature environments,” Sensors, vol. 15, pp. 21844-21856, 2015.
[18]         Q. Tan et al., “A wireless passive pressure and temperature sensor via a dual LC resonant circuit in harsh environments,” Journal of Microelectromechanical Systems, vol. 26, pp. 351-356, 2017.
[19]         L. Dong et al., “An LC passive wireless multifunctional sensor using a relay switch,” IEEE Sensors Journal, vol. 16, pp. 4968-4973, 2016.
[20]         M.C. Scardelletti et al., “Wireless capacitive pressure sensor with directional RF chip antenna for high temperature environments,” IEEE International Conference on Wireless for Space and Extreme Environments (WiSEE), 2015.
[21]         A.N. Reddy et al., “Split ring resonator and its evolved structures over the past decade,” International Conference ON Emerging Trends in Computing, Communication and Nanotechnology (ICECCN), 2013.
[22]         E.L. Chuma et al., “Microwave sensor for liquid dielectric characterization based on metamaterial complementary split ring resonator,” IEEE Sensors Journal, vol. 18, pp. 9978-9983, 2018.
[23]         R.A. Alahnomi et al., “High-Q sensor based on symmetrical split ring resonator with spurlines for solids material detection.,” IEEE Sensors Journal, vol. 17, pp. 2766-2775, 2017.
[24]         J. Mata-Contreras et al., “Application of split ring resonator (SRR) loaded transmission lines to the design of angular displacement and velocity sensors for space applications.,” IEEE Transactions on Microwave Theory and Techniques, vol. 65, pp. 4450-4460, 2017.
[25]         X.J. He et al., “Thin-film sensor-based tip-shaped split ring resonator metamaterial for microwave application,” Microsystem technologies, vol. 16, pp. 1735-1739, 2010.
[26]         A.K.. Horestani et al., “Rotation sensor based on horn-shaped split ring resonator,” IEEE Sensors Journal, vol. 13, pp. 3014-3015, 2013.
[27]         Z. Abbasi. et al., “High-resolution chipless tag RF sensor,” IEEE Transactions on Microwave Theory and Techniques, vol. 68, pp. 4855-4864, 2020.
[28]         M.H.  Zarifi et al., “Liquid sensing using active feedback assisted planar microwave resonator,” IEEE Microwave and Wireless Components Letters, vol. 25, pp. 621-623, 2015.
[29]         M.H.  Zarifi et al., “Non-contact liquid sensing using high resolution microwave microstrip resonator,” IEEE MTT-S International Microwave Symposium, 2015.
[30]         Z.  Abbasi et al., “Contactless pH measurement based on high resolution enhanced Q microwave resonator,” IEEE MTT-S International Microwave Symposium, 2018.
[31]         M.H.  Zarifi et al., “High-resolution RFID liquid sensing using a chipless tag,” IEEE Microwave and Wireless Components Letters, vol. 27, pp. 311-313, 2017.
[32]         R. Mirzavand et al., “High-resolution dielectric sensor based on injection-locked oscillators,” IEEE Sensors Journal, vol. 18, pp. 141-148, 2017.
[33]         V. Sekar et al., “A self-sustained microwave system for dielectric-constant measurement of lossy organic liquids.,” IEEE Sensors Journal, vol. 60, pp. 1444-1455, 2012.
[34]         M. Nosrati et al., “Locally strong-coupled microwave resonator using PEMC boundary for distant sensing applications,” IEEE Transactions on Microwave Theory and Techniques, vol. 67, pp. 4130-4139, 2019.
[35] J. Xiong et al., “Wireless LTCC-based capacitive pressure sensor for harsh environment,” Sensors and Actuators A: Physical, vol. 197, pp. 30-37, 2013.
Volume 11, Issue 1 - Serial Number 26
Serial No. 26, Spring & Summer
June 2023
Pages 31-39
  • Receive Date: 28 August 2021
  • Revise Date: 28 December 2022
  • Accept Date: 16 January 2023
  • Publish Date: 22 May 2023