نوع مقاله : مقاله پژوهشی
عنوان مقاله English
نویسندگان English
A Lorentz-force-based magnetic field microsensor using a MEMS resonator structure is designed and analyzed in this study. The sensor utilizes a seesaw plate, two torsional beams, four flexural beams, and differential capacitive sensing to detect displacement caused by the Lorentz force. The design and simulation are performed simultaneously using COMSOL and MATLAB to optimize critical parameters, including resonant frequency, mechanical stress, displacement, and capacitance variation. The results show that at an excitation current of 22 mA, the maximum stress is 34 MPa, the capacitance change reaches 120 pF, and the mechanical quality factor is 919. Given its compact size, low power consumption, and high sensitivity, the proposed sensor is suitable for applications such as wireless communication systems, microsatellites, and magnetic tracking systems.
کلیدواژهها English
