بهینه سازی فیلتر رنگی پلاسمونیکی برای حسگر تصویر برداری

نوع مقاله : مقاله پژوهشی

نویسندگان

1 دانشجوی ارشد برق الکترونیک دانشگاه علم وصنعت ایران

2 دانشیار دانشگاه علم وصنعت

چکیده

در این مقاله، فیلتر رنگی پلاسمونیکی شیاردار پشت و روی چشم گاوی برای کاربرد در حسگرهای تصویربرداری استاندارد سی‌ماس ارائه‌شده است. فیلتر پلاسمونیکی فیلم نازک ارائه‌شده از جنس نقره بوده و به کمک بهینه‌سازی الگوریتم ازدحام ذرات با اصلاح پارامترهای دوره‌ تناوب، زمان وظیفه، ضخامت بدنه، ارتفاع لایه‌ شبکه‌ای و قطر روزنه برای تصویربرداری مادون‌قرمز بهینه‌سازی شده است. این فیلتر پلاسمونیکی برای طول‌موج مرکزی nm 835 طراحی‌شده است که دارای بیشینه‌ بازدهی انتقال نور  8/36% و پهنا در نصف مقدار بیشینه nm 110 می‌باشد. از مزیت‌های این فیلتر می‌توان به قابلیت پیاده‌سازی با هزینه‌ پایین، نزدیک بودن به ناحیه‌ حساس به نور، کاهش هم‌شنوایی و عدم استفاده از پلیمرهای حساس به دما که برای کاربردهای با شرایط دمایی سخت مناسب است اشاره کرد. همچنین با تجزیه و تحلیل عملکرد این فیلتر پلاسمونیکی و مقایسه آن با فیلترهای نوری دارای طول‌موج مرکزی مشابه، به بررسی ویژگی پلاسمون سطحی با توزیع شدت میدان الکتریکی محلی پرداخته ‌شده است.

کلیدواژه‌ها


[1]      E. R. Fossum, “CMOS Image Sensors: Electronic Camera on a Chip,” IEEE Trans. Electron Devices, Vol. 44,  No. 10, pp. 1689-1698, 1997.##
 
[2]      T. Kuroda, “Essential Principles Of Image Sensors”; CRC. press: Boca Raton, FL, 2014.##
 
[3]      P. M. Hubel, J. Liu, R. J. Guttosch, “Spatial Frequency Response of Color Image Sensors: Bayer Color Filters And Foveon X3,” Proc. SPIE, Vol. 5301, No. 1, pp. 402–407, 2004.##
 
[4]      P. A. Cheremkhin, V. V. Lesnichii, N. V. Petrov, “Use of Spectral Characteristics of DSLR Cameras with Bayer Filter Sensors,” Journal of Physics: Conference Series. 2014, 012021-5.##
 
[5]      T. H. Hsu, Y. K. Fang, C. Y. Lin, S. F. Chen, C. S. Lin, D. N. Yaung, S. G. Wuu, C. S. Wang, “Light Guide for Pixel Crosstalk Improvement in Deep Submicron CMOS Image Sensor,” IEEE Electron Device Lett., Vol. 25, No. 1, pp. 22–24, 2004.##
 
[6]      A. Tournier, F. Leverd, L. Favennec, C. Perrot, L. Pinzelli, D. Jeanjean, F. Hirigoyen, L. Grant “Pixel-to-Pixel Isolation by Deep Trench Technology : Application to CMOS Image Sensor,” In Proc. of the Int. conf on Image Sens, Vol. 5, No. 1, pp. 5–8, 2011.##
 
[7]      C. H. Koo, H. K. Kim, K. H. Paik, Y. K Park, C. R. Moon, S. H. Lee, J. T Kong, “ Improvement of Crosstalk on 5M CMOS Image Sensor with 1.7x1.7μm 2 Pixels ,” Ultrafast Phenom. Semicond. Nanostructure Mater. Semicond. Photodetectors IV, Vol. 6471, No. 1, pp. 6471151-8, 2007.##
 
[8]      Q. Chen, D. Das, D. Chitnis, K. Walls, T.D. Drysdale, S. Collins, D.R.S. Cumming, “A CMOS Image Sensor Integrated with Plasmonic Colour Filters,” Plasmonics, Vol. 7, No. 4, pp. 695–699, 2012.##
 
[9]      T. W. Martin and W. A. Light, “Fabrication and Performance of Color Filter Arrays for Solid- State Imagers,” IEEE Trans. Electron Devices, Vol. 2, No. 25, pp. 97-101, 1978.##
 
[10]   M. S. Mirotznik, “Photonic Crystal Filters for Multi-Band Optical Filtering on a Monolithic Substrate,” J. Nanophotonics, Vol. 3, No. 1, pp. 031506, 2009.##
 
[11]   P. Crystal, C. Filter, Y. Inaba, M. Kasano, K. Tanaka, and T. Yamaguchi, “Degradation-Free MOS Image Sensor With,” IEEE Electron Device Lett., Vol. 27, No. 6, pp. 457–459, 2006.##
 
[12]   Y. T. Yoon, S. S. Lee, “Transmission Type Color Filter Incorporating a Silver Film Based Etalon,” Opt. Express, Vol. 18, No. 5, pp. 5344–5349, 2010.##
 
[13]   L. Frey, P. Parrein, J. Raby, C. Pellé, D. Hérault, M. Marty, J. Michailos, “Color Filters Including Infrared Cut-Off Integrated on CMOS Image Sensor,” Opt. Express, Vol. 19, No. 14, pp. 13073, 2011.##
 
[14]   Y. T. Yoon, H. S. Lee, S. S. Lee, S. H. Kim, J. D. Park, K. D. Lee, “Color Filter Incorporating a Subwavelength Patterned Grating in Poly Silicon,” Opt. Express, Vol. 16, No. 4, pp. 2374–80, 2008.##
 
[15]   Y. Kanamori, M. Shimono, K. Hane, “Fabrication of Transmission Color Filters Using Silicon Subwavelength Gratings on Quartz Substrates,” IEEE Photonics Technol. Lett., Vol. 18, No. 20, pp. 2126–2128, 2006.##
 
[16]   H. Ghaemi, T. Thio, D. Grupp, T. Ebbesen, “Surface Plasmons Enhance Optical Transmission Through Subwavelength Holes,” Phys. Rev. B, Vol. 58, No. 11, pp. 6779–6782, 1998.##
 
[17]   G. Verhoeven, “Imaging The Invisible Using Modified Digital Still Cameras For Straightforward and Low-Cost Archaeological Near-Infrared Photography,” J. Archaeol. Sci., Vol. 35, No. 12, pp. 3087–3100, 2008.##
 
[18]   B. Schwarz, G. Ritt, M. Körber, and B. Eberle, “Laser-Induced Damage Threshold of Camera Sensors and Micro-Opto-Electro-Mechanical Systems,” Electro-Optical Infrared Syst. Technol. Appl. XIII, Vol. 9987, No. 3, pp. 99870D, 2016.##
 
[19]   E. I. L. Jull, H. F. Gleeson, “Tuneable and Switchable Liquid Crystal Laser Protection System,” Appl. Opt., Vol. 56, No. 29, pp. 8061-8066, 2017.##
 
[20]   A. S. Faraji, V. Ahmadi,“Enhanced Raman Amplification in Hybrid Photonic Crystal Based Waveguide Structure by Using Optofluidic Materials” Journal of App. Elect Vol. 4, No. 3, pp. 57-64, 2016. (in Persian)##
 
[21]   S. Pimenta, S. Cardoso, A. Miranda, P. De Beule, E. M. S. Castanheira, G. Minas, “Design and Fabrication of Sio2/Tio2 and Mgo/Tio2 Based High Selective Optical Filters for Diffuse Reflectance and Fluorescence Signals Extraction,” Biomed. Opt. Express, Vol. 6, No. 8, pp. 3084, 2015.##
 
[22]   M. J. Uddin, R. Magnusson, “Efficient Guided-Mode-Resonant Tunable Color Filters,” IEEE Photonics Technol. Lett., Vol. 24, No. 17, pp. 1552–1554, 2012.##
 
[23]   K. Kintaka, T. Majima, J. Inoue, K. Hatanaka, J. Nishii, S. Ura, “Cavity-Resonator-Integrated Guided-Mode Resonance Filter for Aperture Miniaturization,” Opt. Express, Vol. 20, No. 2, pp. 1444, 2012.##
 
[24]   L. Novotny, B. Hecht “Principles of Nano-Optics.”; Cambridge university press, 2012.##
 
[25]   S. M. R. Safaee, M. Janipour, M. A. Karami, “Modeling and Analysis of Optical Properties of a Gold Nanoring Based on Electric and Magnetic Dipoles,” Appl. Opt., Vol. 54, No. 28, pp. 8313, 2015.##
 
[26]   M. Janipour, M. A. Karami, R. Sofiani, F. H. Kashani, “A Novel Adjustable Plasmonic Filter Realization by Split Mode Ring Resonators,” J. Electromagn. Anal. Appl., Vol. 05, No. 12, pp. 405–414, 2013.##
 
[27]   A. V. Zayats, L. Salomon, F. De. Fornel, “How light gets through periodically nanostructured metal films: A role of surface polaritonic crystals,” J. Microsc., Vol. 210, No. 3, pp. 344–349, 2003.##
 
[28]   L. Salomon, F. Grillot, A. V. Zayats, F. De. Fornel, “Near-Field Distribution of Optical Transmission of Periodic Subwavelength Holes in a Metal Film,” Phys. Rev. Lett., Vol. 86, No. 6, pp. 1110–1113, 2001.##
 
[29]   W. C. Liu, D. P. Tsai, “Optical Tunneling Effect of Surface Plasmon Polaritons and Localized Surface Plasmon Resonance,” Phys. Rev. B, Vol. 65, No. 15, pp. 1–6, 2002.##
 
[30]   P. C. Li, Y. Zhao, A. Alu, E. T. Yu, “Experimental Realization and Modeling of a Subwavelength Frequency-Selective Plasmonic Metasurface,” Appl. Phys. Lett., Vol. 99, No. 22, pp. 221106, 2011.##
 
[31]   A. Degiron, H. J. Lezec, W. L. Barnes, T. W. Ebbesen, “Effects of Hole Depth on Enhanced Light Transmission Through Subwavelength Hole Arrays,” Appl. Phys. Lett., Vol. 81, No. 23, pp. 4327–4329, 2002.##
 
[32]   H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, T. W. Ebbesen “Beaming Light from a Subwavelength Aperture,” Science., Vol. 297, No. 5582, pp. 820–822, 2002.##
 
[33]   Y. S. Do, J. H. Park, B. Y. Hwang, S. M. Lee, B. K. Ju, and K. C. Choi, “Color Filters: Plasmonic Color Filter and Its Fabrication for Large-Area Applications,” Adv. Opt. Mater., Vol. 1, No. 2, pp. 109–109, 2013.##
 
[34]   S. Yokogawa, S. P. Burgos, H. A. Atwater, “Plasmonic Color Filters for CMOS Image Sensor Applications,” Nano letters, Vol. 12, No. 8, pp.4349-4354, 2012.##
 
[35]   T. Xu, H. Shi, Y. K. Wu, L. J. Guo, “Structural Colors: from Plasmonic to Carbon Nanostructures,” Small, Vol. 7, No. 22, pp. 3128–3136, 2011.##
 
[36]   G. SI, Y. Zhao, A. J. Danner, Y.J. Liu, “Reflective Plasmonic Color Filters Based on Lithographically Patterned Silver Nanorod Arrays. Nanoscale,” Nanoscale, Vol. 5, No. 14, pp. 6243-6248, 2014.##
 
[37]   C. Genet, T. W. Ebbesen, “Light in Tiny Holes,” Nature Journals, Vol. 445, No. 7123, pp. 39–46, 2007.##
 
[38]   M. Bigas, E. Cabruja, J. Forest, J. Salvi, “Review of CMOS Image Sensors,” Microelectronics journal, Vol. 37, No. 5, pp. 433–451, 2006.##
 
[39]   W.L. Barnes, A. Dereux, T.W. Ebbesen, “Surface Plasmon Subwavelength Optics,” nature, Vol. 424, No. 6950, pp. 824-830,  2003.##
 
[40]   A. Miyamichi, , K. Yasutomi, “Optical Color Filter Based on Surface Plasmon Resonance Using Corrugated Metallic Thin Film for Image Sensor,” Appl. Phys. Lett, Vol. 98, No. 9, pp. 19–20, 2011.##
 
[41]   N. Methods, “FDTD Solutions Numerical Methods,” pp. 1–33, 2012.##
 
[42]   K. S. Yee, J. S. Chen, “The Finite-Difference Time-Domain (FDTD)  and the Finite-Volume Time-Domain Methods in solving Maxwell’s equations,” IEEE Trans., Vol. 45, No. 3, pp. 354–363, 1997.##
 
[43]   S. D. Gedney, “Introduction to the Finite-Difference Time-Domain (FDTD) Method for Electromagnetics,” Synthesis Lectures on Computational Electromagnetics, Vol. 6, No. 1, pp. 1-250, 2011.##
 
[44]   Q. Chen, D. Chitnis, K. Walls, T. D. Drysdale, S. Collins, D. R. S. Cumming, “CMOS Photodetectors Integrated With Plasmonic Color Filters,” IEEE Photonics Technol. Lett., Vol. 24, No. 3, pp. 197–199, 2012.##
 
[45]   J. A. Porto, J. B. Pendry, “Transmission Resonances on Metallic Gratings with Very Narrow Slits.” Physical review letters, Vol. 83, No. 14, pp. 2845,1999.##
 
[46]   L. Martín-Moreno, F. J. Garcia-Vidal, H. J. Lezec, K. M. Pellerin, T. Thio, J. B. Pendry, T. W. Ebbesen, “Theory of Extraordinary Optical Transmission Through Subwavelength Hole Arrays,” Phys. Rev. Lett., Vol. 86, No. 6, pp. 1114–1117, 2001.##
 
[47]   L. Martín-Moreno, F. J. García-Vidal, H. J. Lezec, A. Degiron, T. W. Ebbesen, “Theory of Highly Directional Emission from a Single Subwavelength Aperture Surrounded by Surface Corrugations,” Phys. Rev. Lett., Vol. 90, No. 16, pp. 167401., 2003.##
[48]   E. Laux, C. Genet, T. Skauli, and T. W. Ebbesen, “Plasmonic Photon Sorters for Spectral and Polarimetric Imaging,” Nat. Photonics, Vol. 2, No. 3, pp. 161–164, 2008.##
 
[49]   W. Nakagawa, P. Sun, C. Chen, Y. Fainman, “Wide-Field-of-View Narrow-Band Spectral Filters Based on Photonic Crystal Nanocavities,” Optics Letters, Vol. 27, No. 3, pp. 191–193, 2002.##
 
[50]   D. Zhao, H. Gong, Y. Yang, Q. Li,“Realization of an Extraordinary Transmission Window for a Seamless Ag Film Based On Metal-Insulator-Metal Structures,” Appl. Phys. Lett., Vol. 102, No. 20, pp. 1–6, 2013.##